Yuta Makino

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 9:00 AM - 11:45 AM B101 (B101)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[23a-B101-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:45 AM - 11:00 AM

△ [23a-B101-7] Effects of Atmospheric Pressure Low Temperature O₂ Plasma-Assisted Annealing
on Pt-Doped Rutile Phase TiO₂ Nanoparticles

〇(M1)Yuta Makino¹, Retsuo Kawakami¹, Shin-ichiro Yanagiya^1,2, Masahito Niibe³, Yoshitaka Nakano⁴, Takashi Mukai⁵ (1.Tokushima Univ., 2.pLED, Tokushima Univ., 3.Hyogo Univ., 4.Chubu Univ., 5.Nichia Corp.)