Hiroya Kobayashi

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 9:00 AM - 11:45 AM B101 (B101)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[23a-B101-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

11:00 AM - 11:15 AM

[23a-B101-8] Effect of post-treatment with atmospheric pressure plasma on metal oxide thin films deposited by mist CVD

〇(M2)Hiroya Kobayashi¹, Takeda Keigo¹, Hiramatsu Mineo¹ (1.Meijo Univ.)