Yusuke Hisatsune

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 9:00 AM - 12:00 PM B204 (B204)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[23a-B204-1~11] 13.7 Compound and power devices, process technology and characterization

9:30 AM - 9:45 AM

[23a-B204-3] Fabrication of GaN FinFETs using selective area growth: Improvements of process to form growth windows

〇Yusuke Hisatsune¹, Takashi Ota¹, Mitsutaka Sasaki¹, Tokio Takahashi², Toshihide Ide², Mitsuaki Shimizu², Takuya Hoshii¹, Kuniyuki Kakushima¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui¹ (1.Tokyo Tech, 2.AIST)

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