Tomoki Oku

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 9:30 AM - 11:30 AM P04 (Arena)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[23a-P04-1~2] 13.3 Insulator technology

9:30 AM - 11:30 AM

[23a-P04-1] Formation energy at a stable site for halogen ions in Si₃N₄ and SiO₂ films

〇Tomoki Oku¹, Masahiro Totsuka¹, Hajime Sasaki¹ (1.Mitsubishi Electric)