Atsushi Miura

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 9:30 AM - 11:30 AM P05 (Arena)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[23a-P05-1~1] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 11:30 AM

[23a-P05-1] A Consideration of Vapor-Permeable Membrane Structure for NEMS Vacuum Packaging in Narrow Space

〇Atsushi Miura¹, Keiichi Shimaoka¹, Keita Funayama¹, Hiroya Tanaka¹, Yukihiro Tadokoro¹ (1.TOYOTA CRDL)