Zhiyuan Shen

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 9:30 AM - 11:30 AM P06 (Arena)

Poster presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)

[23a-P06-1~28] 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)

9:30 AM - 11:30 AM

[23a-P06-17] Sputtering deposition of ZnO:Al Transparent Conducting Films on Solid-Phase Crystallized Seed Layers: Effects of Crystallization Temperature

〇Zhiyuan Shen¹, Hisato Yabuta², Naoto Yamashita¹, Kunihiro Kamataki¹, Takamasa Okumura¹, Kazunori Koga^1,3, Masaharu Shiratani¹, Naho Itagaki¹ (1.ISEE, Kyushu Univ., 2.CPNE, Kyushu Univ., 3.NINS.)

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