9:30 AM - 11:30 AM [23a-P06-18] Low Resistivity of GZO Films by Zn-doping for GZO Powder Target and its Application to Flexible Substrates 〇Toya Shirasu1, Yugo Tamai1, Yasuji Yamada1, Shuhei Funaki1 (1.Shimane Univ.)