Hiroki Takahashi

→ Search for Hiroki Takahashi in Google Scholar

Speaker, Author, Co-Author

Fri. Sep 23, 2022 1:15 PM - 5:00 PM C102 (C102)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[23p-C102-1~14] 13.3 Insulator technology

4:45 PM - 5:00 PM

[23p-C102-14] Investigation of Low Temperature Oxidation of Si Substrates Using Chemical Solutions

〇Hiroki Takahashi¹, Gen Shimizu¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.TUAT)