Hayato Miyagawa

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 1:15 PM - 5:00 PM C102 (C102)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[23p-C102-1~14] 13.3 Insulator technology

1:30 PM - 1:45 PM

[23p-C102-2] Effects of Underside-Si Annealing on Charge Breakdown of LPCVD SiN Film

〇Hayato Miyagawa¹, Kosuke Bunya¹, Hisatsugu Kurita², Masataka Nakamura², Yoshiaki Kamigaki³ (1.Kagawa Univ., 2.ROHM Hamamatsu., 3.E&B Research Lab.)