Yoshiharu Kirihara

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 1:15 PM - 5:00 PM C102 (C102)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[23p-C102-1~14] 13.3 Insulator technology

2:15 PM - 2:30 PM

[23p-C102-5] Hard X-ray Photoemission Spectroscopy on Localization of Interface Dipole Modulation in SiO₂/TiO_x/HfO₂ MIM structure

〇Yoshiharu Kirihara¹, Shunichi Ito¹, Akira Yasui², Noriyuki Miyata³, Hiroshi Nohira¹ (1.Tokyo City Univ., 2.JASRI, 3.AIST)

2:30 PM - 2:45 PM

[23p-C102-6] Hard X-ray Photoemission Spectroscopy Study on Interface Dipole Modulation Mechanism in Al₂O₃/TiO_x/SiO₂ MOS structure

〇Yoshiharu Kirihara¹, Shunichi Ito¹, Akira Yasui², Noriyuki Miyata³, Hiroshi Nohira¹ (1.Tokyo City Univ., 2.JASRI, 3.AIST)