Xueyang Han

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 1:15 PM - 5:00 PM C102 (C102)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[23p-C102-1~14] 13.3 Insulator technology

3:30 PM - 3:45 PM

▲ [23p-C102-9] (100) and (111) n-Ge/ GeO_x/ Al₂O₃ MOS Interface Properties with Different Annealing Temperature and Atmosphere

〇Xueyang Han¹, Chia Tsong Chen¹, Mengnan Ke², Ziqiang Zhao¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.Univ. Tokyo, 2.Chiba Univ.)