The 83rd JSAP Autumn Meeting 2022

Tatsuya Okada

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Chairperson, etc.

Tue. Sep 20, 2022 1:00 PM - 4:30 PM A406 (A406)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20p-A406-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tatsuya Okada(Univ. of the Ryukyus), Reo Kometani(Univ. of Tokyo)