The 83rd JSAP Autumn Meeting 2022

Session information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20p-A406-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tue. Sep 20, 2022 1:00 PM - 4:30 PM A406 (A406)

Tatsuya Okada(Univ. of the Ryukyus), Reo Kometani(Univ. of Tokyo)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

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