Hiroshige Kogayu

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:00 PM - 4:30 PM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20p-A406-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

4:15 PM - 4:30 PM

[20p-A406-13] Study of three-axes Piezo-resistive Accelerometer using Full Minimal-Fab Process

〇Hiroshige Kogayu¹, Hiroyuki Tanaka², Fumito Imura², Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST)