Takashi Yajima

→ Search for Takashi Yajima in Google Scholar

Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:00 PM - 4:30 PM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20p-A406-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:45 PM - 2:00 PM

[20p-A406-4] Causes of measurement error of the Minimal Fab surface particle scanner

〇Takashi Yajima¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)