Takeshi Hamamoto

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:00 PM - 4:30 PM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20p-A406-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

4:00 PM - 4:15 PM

[20p-A406-12] Comparison of Fully-Depleted(FD) and Partially-Depleted(PD) Operation of SOI CMOS of Minimal Fab

〇Takeshi Hamamoto¹, Shingo Ura³, Masahiro Matsuda³, Yuji Kitayama⁴, Satoshi Maruyama⁴, Sommawan Khumpuang², Yasunari Shiba⁴, Tadaaki Tsuchiya³, Shiro Hara² (1.MINIMAL, 2.AIST, 3.Logic Research, 4.Yokogawa Solution Service)

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