Hiroyoshi Hongoh

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:00 PM - 4:30 PM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20p-A406-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:00 PM - 1:15 PM

[20p-A406-1] Error Analysis in Automatic Operations of Minimal Fab To

〇Hiroyoshi Hongoh², Sommawan Khumpuang^2,1, Shiro Hara^2,1 (1.AIST, 2.MINIMAL)