Hiroyuki Tanaka

→ Search for Hiroyuki Tanaka in Google Scholar

Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:00 PM - 4:30 PM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20p-A406-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:30 PM - 3:45 PM

[20p-A406-10] Study of pulse frequency dependence of RF bias in Bosch Process

〇Hiroyuki Tanaka¹, Yoshiyuki Nozawa², Toshihiro Hayami², Sommawan Khumpuang^1,3, Shiro Hara^1,3 (1.AIST, 2.SPPT, 3.MINIMAL)