Fumito Imura

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:00 PM - 4:30 PM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20p-A406-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:45 PM - 4:00 PM

[20p-A406-11] Development of Process for Through Silicon Vias (TSVs) Fabricated by Minimal Fab (II)

〇Fumito Imura¹, Hiroyuki Tanaka¹, Kouji Oosawa², Takuro Kono², Kenzo Shodo², Yasuo Terasawa², Sommawan Khumpuang^1,3, Shiro Hara^1,3 (1.AIST, 2.NIDEK, 3.MINIMAL)

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