Masashi Kase

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:00 PM - 4:30 PM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20p-A406-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:15 PM - 3:30 PM

[20p-A406-9] Study on Improvement of Al Wiring Dimension of Minimal Fab Multilayer Wiring Process

〇Masashi Kase¹, Khumpuang Sommawan^1,2, Shirou Hara^1,2 (1.AIST, 2.MINIMAL)