The 83rd JSAP Autumn Meeting 2022

Jiro Yamamoto

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Chairperson, etc.

Tue. Sep 20, 2022 9:00 AM - 12:30 PM C101 (C101)

  • Oral presentation
  • | 7 Beam Technology and Nanofabrication
  • | 7.3 Micro/Nano patterning and fabrication

[20a-C101-1~13] 7.3 Micro/Nano patterning and fabrication

Jiro Yamamoto(Hitachi), Jun Taniguchi(Tokyo Univ. of Sci.)