Kaoru Toko(Univ. of Tsukuba), Junji Yamanaka(Univ. of Yamanashi)
Junji Yamanaka
Chairperson, etc.
Wed. Sep 21, 2022 9:00 AM - 11:15 AM A406 (A406)
- Oral presentation
- | 13 Semiconductors
- | 13.4 Si processing /Si based thin film / MEMS / Equipment technology