The 83rd JSAP Autumn Meeting 2022

Takafumi Ishida

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Chairperson, etc.

Wed. Sep 21, 2022 9:00 AM - 11:45 AM C306 (C306)

  • Oral presentation
  • | 7 Beam Technology and Nanofabrication
  • | 7.2 Applications and technologies of electron beams

[21a-C306-1~10] 7.2 Applications and technologies of electron beams

Katsuhisa Murakami(AIST), Takafumi Ishida(Nagoya University)