The 83rd JSAP Autumn Meeting 2022

Giichiro Uchida

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Chairperson, etc.

Fri. Sep 23, 2022 9:00 AM - 11:45 AM B101 (B101)

  • Oral presentation
  • | 8 Plasma Electronics
  • | 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[23a-B101-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Kosuke Takenaka(Osaka Univ.), Giichiro Uchida(Meijo Univ)