[20a-A200-1~10] 17.3 Layered materials

[20a-A200-4] Hydrogen flow rate dependence in the growth direction of the NbS₂ thin film produced by the CVD method

〇Shoki Arasawa¹, Seiya Yokokura², Taro Nagahama², Toshihiro Shimada² (1.CSE.Hokkaido Univ., 2.Eng.Hokkaido Univ.)

Keywords:Transition metal dichalcogenide, Chemical vapor deposition

The growth direction of the NbS₂ thin film is controlled by changing the hydrogen flow rate.