10:45 AM - 11:00 AM
[20a-A406-7] Performance of polycrystalline SiGe thin-film transistors on glass substrates
Keywords:Semiconductor, SiGe, TFT
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
[20a-A406-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Tue. Sep 20, 2022 9:00 AM - 11:30 AM A406 (A406)
Keisuke Yamamoto(Kyushu Univ.), Noriyuki Uchida(AIST)