[20a-B204-1~11] 6.3 Oxide electronics

[20a-B204-6] Hydrogen gas sensing properties of SnO₂ thin films loaded with Pt-nanoparticles

Syuhei Nisikawa¹, Makoto Kashiwagi¹, Junjun Jia², Yuki Oguti¹, Akira Nakamura³, 〇Yuzo Shigesato¹ (1.AGU, 2.Waseda Univ., 3.MinebeaMitsumi Inc.)

Keywords:H2 gas sensing at RT, Pt loaded SnO2 film, Pt nano particles

As the thin-film on-tip H₂ gas sensors, SnO₂ films were deposited by rf magnetron sputtering using a SnO₂ ceramic target. In order for the H₂ sensing at RT, Pt nano-particles were loaded on the SnO₂ film surfaces as the catalyst. The Pt nano-particles were fabricated by the very short-time deposition by rf sputtering, where a three-dimensional growth mode (the Volmer-Weber-type) is expected because the deposited atoms are bound more strongly to each other than to the substrate surface. The surface coverage of the Pt analyzed quantitatively by XPS was 80% by the deposition of 11 sec. Such Pt/SnO₂ films performed high H₂ sensitivity at RT.