[20a-C101-1~13] 7.3 Micro/Nano patterning and fabrication

[20a-C101-13] Two-tone pattern transfer using nanoimprint and silver ink

〇(M1)Keisuke Enomoto¹, Jun Taniguchi¹ (1.TUS)

Keywords:nanoimprint, two-tone, silver ink

Vacuum evaporation of metals has the disadvantage of being time consuming. Therefore, there is a need for a technology to deposit metal films under atmospheric pressure. Therefore, we attempted to perform two-tone transfer using silver ink. In order to achieve two-tone transfer, it is necessary to separate the metal film from the top surface of the mold and the metal part at the bottom of the hole, but in the case of silver ink, the hole is often completely filled, making separation difficult. Therefore, in this study, we devised a method to separate the top surface from the silver ink at the bottom of the hole.