The 83rd JSAP Autumn Meeting 2022

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[20a-C302-1~9] 6.4 Thin films and New materials

Tue. Sep 20, 2022 9:00 AM - 11:30 AM C302 (C302)

Kohei Fujiwara(Tohoku Univ.)

9:15 AM - 9:30 AM

[20a-C302-2] Influence of sputtering gas species on resistivity of Au thin films

〇Fumito Hayasaka1, Midori Kawamura1, Takayuki Kiba1, Yoshio Abe1 (1.Kitami Inst. of Tech.)

Keywords:sputtering, Au, resistivity