[20p-A202-1~19] 3.1 Basic optics and frontier of optics (merged with formerly 3.2 Equipment optics and materials)

△ [20p-A202-15] Spherical aberration correction for high-speed 3D measurement of dislocations in GaN crystal

〇Yuki Miura¹, Yusuke Tuchiya¹, Yuichi Kozawa¹, Yuuki Uesugi¹, Shunichi Sato¹ (1.IMRAM, Tohoku Univ.)

Keywords:imaging, Airy beam, Bessel beam

We have developed a high-speed 3D imaging method based on the principle of simultaneous depth excitation with a long-focus depth Bessel beam and depth information recovery with a self-curving Airy beam. However, spherical aberration caused by the high refractive index of GaN is a problem when applying this method to observation of dislocations in GaN crystals. In this session, we will present the results of spherical aberration correction on the excitation and detection part and 3D imaging.