The 83rd JSAP Autumn Meeting 2022

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13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20p-A406-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tue. Sep 20, 2022 1:00 PM - 4:30 PM A406 (A406)

Tatsuya Okada(Univ. of the Ryukyus), Reo Kometani(Univ. of Tokyo)

1:00 PM - 1:15 PM

[20p-A406-1] Error Analysis in Automatic Operations of Minimal Fab To

〇Hiroyoshi Hongoh2, Sommawan Khumpuang2,1, Shiro Hara2,1 (1.AIST, 2.MINIMAL)

Keywords:minimalfab

ミニマルファブ装置をデバイス製造工程と同等の使い方をして，生じた搬送エラーとプロセスエラー等を計測し，そこで生じた問題を考察した。