The 83rd JSAP Autumn Meeting 2022

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[20p-B201-1~16] 15.4 III-V-group nitride crystals

Tue. Sep 20, 2022 1:30 PM - 6:00 PM B201 (B201)

Tsutomu Araki(Ritsumeikan Univ.), Atsushi Kobayashi(Univ. of Tokyo), Yusuke Hayashi(Osaka Univ.)

4:00 PM - 4:15 PM

[20p-B201-10] Crystallographic Orientation Control for Annealed Sputtered AlN Grown on m-Sapphire

〇Kenjiro Uesugi1,2, Yixian Zhang3, Kanako Shojiki3, Shiyu Xiao3, Hideto Miyake3 (1.MRPCO, Mie Univ., 2.Grad. Sch. of RIS, Mie Univ., 3.Grad. Sch. of Eng., Mie Univ.)

Keywords:AlN, Sputtering, Annealing