Suppression of stacking fault expansion in SiC PiN diodes by H+implantation

Presentation information

Oral presentation

15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)

Tue. Sep 20, 2022 1:30 PM - 3:45 PM C306 (C306)

2:30 PM - 2:45 PM

〇(M1)Ohga Watanabe¹, Toshiki Mii¹, Shunta Harada², Hitoshi Sakane³, Masashi Kato¹ (1.NITech, 2.Nagoya Univ., 3.SHI-ATEX Co. Ltd.)

Keywords:SiC