[20p-C401-1~16] 13.6 Nanostructures, quantum phenomena, and nano quantum devices

▲ [20p-C401-8] Direct observation of coherent energy exchange induced by the internal mode-coupling effect in MEMS beam resonators

〇Tianye Niu¹, Naomi Nagai¹, Ya Zhang³, Kazuhiko Hirakawa^1,2 (1.IIS, Univ. of Tokyo, 2.INQIE, Univ. of Tokyo, 3.TUAT)

Keywords:MEMS technology, mode coupling, nonlinearity

Microelectromechanical system (MEMS) beam resonators are very attractive for sensing applications owing to their intrinsic high sensitives. So far, there have been several studies on coherent energy transfer between internal coupled modes in MEMS resonators. However, previous works demonstrated the coherent energy exchange only by numerical simulations and did not directly show it by experiments due to very small oscillation amplitude (~0.1%) in their bending-torsional mode-coupling condition. In this study, we have observed an internal mode-coupling effect occurring between the first and the third bending mode through the fifth-order Duffing nonlinearity in doubly-clamped MEMS resonators. We directly observed a gigantic coherent amplitude exchange between the first bending mode (6%) and the third bending mode (16%).