[21a-B203-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[21a-B203-8] Local Bonding States of SnO_x Thin-Film by Reduction Annealing in N₂

〇Kotaro Watanabe¹, Takuma Kawaguchi¹, Tomohiro Yamaguchi¹, Takeyoshi Onuma¹, Tohru Honda¹, Shinya Aikawa¹ (1.Kogakuin Univ.)

Keywords:nitrogen annealing, SnO2, Reduction Annealing