[21a-C202-1~12] 17.3 Layered materials

[21a-C202-4] The fabrication and properties of MoS₂ thin film by mist CVD 2

〇(M1)masahiko komatsu¹, tatsuya yasuoka¹, Li Liu^1,2, toshiyuki kawaharamura^1,2 (1.School of Sys. Eng., Kochi Univ. of Tech., 2.Res. Inst., Kochi Univ. of Tech.)

Keywords:mist CVD, MoS2