10:15 AM - 10:30 AM
[21a-C206-6] Study on Crystallization of a-Si thin films formed on ultrathin SiO2 by RTA Process
Keywords:crystalline silicon, Silicon-on-insulator
Oral presentation
13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials
Wed. Sep 21, 2022 9:00 AM - 12:30 PM C206 (C206)
Koichiro Saga(Sony), Nobuya Mori(Osaka Univ.)
10:15 AM - 10:30 AM
Keywords:crystalline silicon, Silicon-on-insulator