[21a-C206-1~13] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[21a-C206-8] Construction of ReaxFF Toward Atomistic Transport Calculation of Ru Interconnects

〇Takahisa Tanaka¹, Ken Uchida¹ (1.The Univ. of Tokyo)

Keywords:interconnect, surface, molecular dynamics