[21a-C306-1~10] 7.2 Applications and technologies of electron beams

△ [21a-C306-1] Direct observation of atomic structures in beam-sensitive materials using ultra-efficient scanning transmission electron microscopy

〇Kousuke Ooe^1,2, Takehito Seki^2,3, Kaname Yoshida¹, Yuji Kohno⁴, Yuichi Ikuhara^1,2, Naoya Shibata^1,2 (1.JFCC, 2.The Univ. of Tokyo, 3.JST PRESTO, 4.JEOL Ltd.)

Keywords:scanning transmission electron microscopy, low-dose imaging, zeolite

In scanning transmission electron microscopy (STEM), we newly developed the optimum bright-field (OBF) STEM technique, which has approximately two-orders of magnitude higher imaging efficiency than concentional methods. The OBF STEM can visualize atomic structures inside materials at significantly lower dose than conventional conditions. Here, we applied the OBF technique to the observation of zeolites that are well known beam-sensitive materials, and successfully observed atomic structures directly in the zeolitic framework.