[21a-C306-1~10] 7.2 Applications and technologies of electron beams

[21a-C306-3] Transient response Imaging of device potential using ultra-fast time resolution SEM

〇Kohei Kawasaki¹, Yuga Emoto¹, Yuki Yamamoto¹, Samuel Jeong¹, Yusuke Arashida¹, Shoji Yoshida¹, Keishi Akada¹, Jun-ichi Fujita¹ (1.Univ. of Tsukuba)

Keywords:scanning electron microscopy, time resolution measurement, surface potential