[21p-A101-1~16] 3.10 Photonic structures and phenomena (formerly 3.11)

[21p-A101-4] Investigation on the high productive fabrication of high brightness PCSEL

〇Wataru Kunishi^1,2, Miyai Eiji^1,2, Menaka De Zoysa¹, Kenji Ishizaki¹, Masahiro Yoshida¹, Susumu Noda¹ (1.Kyoto Univ., 2.ROHM Co., Ltd.)

Keywords:Laser diode, LiDAR, Surface emission

We fabricated Photonic Crystal Surface Emitting Laser (PCSEL) by high productive process of NIL. This NIL is processed in the following order.
1. Fabrication of master mold
2. Fabrication of replica mold
3. Imprinting to the resin coated on GaAs wafer
4. Elimination of the remaining resin
5. Dry etching of GaAs wafer
In this report we adjusted these processes carefully. As a result we have successfully fabricated the photonic crystal pattern which is as precise as the one fabricated by EB lithography. Furthermore, the PCSEL fabricated by NIL and the one fabricated by EB lithography operates pretty much equally.