The 83rd JSAP Autumn Meeting 2022

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Oral presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

[21p-A106-1~18] 15.5 Group IV crystals and alloys

Wed. Sep 21, 2022 1:00 PM - 5:45 PM A106 (A106)

Kaoru Toko(Univ. of Tsukuba), Ryo Matsumura(National Institute for Materials Science (NIMS))

2:15 PM - 2:30 PM

[21p-A106-6] Influences of crack generation on transport properties in strained SiGe grown on Ge-on-Si(111)

〇Daigo Ichikawa1, Youya Wagatsuma1, Michihiro Yamada2, Kohei Hamaya2,3, Kentarou Sawano1 (1.Tokyo City Univ., 2.CSRN, Osaka Univ., 3.OTRI, Osaka Univ.)

Keywords:SiGe/Ge, Crack, Mobility