The 83rd JSAP Autumn Meeting 2022

Kaoru Toko

Chairperson, etc.

Wed. Sep 21, 2022 9:00 AM - 11:15 AM A406 (A406)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Kaoru Toko(Univ. of Tsukuba), Junji Yamanaka(Univ. of Yamanashi)

Wed. Sep 21, 2022 1:00 PM - 5:45 PM A106 (A106)

  • Oral presentation
  • | 15 Crystal Engineering
  • | 15.5 Group IV crystals and alloys

Kaoru Toko(Univ. of Tsukuba), Ryo Matsumura(National Institute for Materials Science (NIMS))