Investigation of Semiconductor Hydrophilicity by Atomosphere Pressure Plasma toward Heterogeneous Material-integrated Photonic Circuits

Koki Hihara; Moataz Eissa; Keita Yamaguchi; Hiromu Onodera; Yoshitaka Oiso; Tomohiro Amemiya; Akitoshi Okino; Nobuhiko Nishiyama

Presentation information

Oral presentation

3 Optics and Photonics » 3.14 Silicon photonics and integrated photonics (formerly 3.15)

[21p-A205-1~21] 3.14 Silicon photonics and integrated photonics (formerly 3.15)

Wed. Sep 21, 2022 1:00 PM - 6:45 PM A205 (A205)

Makoto Okano(AIST), Shota Kita(NTT), Hirohito Yamada(Tohoku Univ)

5:45 PM - 6:00 PM

[21p-A205-18] Investigation of Semiconductor Hydrophilicity by Atomosphere Pressure Plasma toward Heterogeneous Material-integrated Photonic Circuits

〇Koki Hihara¹, Moataz Eissa¹, Keita Yamaguchi¹, Hiromu Onodera¹, Yoshitaka Oiso¹, Tomohiro Amemiya^1,2, Akitoshi Okino^1,2, Nobuhiko Nishiyama^1,2,3 (1.Tokyo Tech, 2.Tokyo Tech IIR, 3.PETRA)

Keywords:Heterogeneous Material-integrated Photonic Circuits, Atomosphere Pressure Plasma, Hydrophilicity