The 83rd JSAP Autumn Meeting 2022

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[21p-B201-1~16] 15.4 III-V-group nitride crystals

Wed. Sep 21, 2022 1:30 PM - 6:00 PM B201 (B201)

Ryuji Katayama(Osaka Univ.), Mitsuru Funato(Kyoto Univ.), Kanako Shojiki(Mie Univ.)

5:00 PM - 5:15 PM

[21p-B201-13] MOVPE growth of BN films on sapphire and high-temperature annealing

〇(M2)Ayaka Itani1, Shigeyuki Kuboya2, Shiyu Xiao1, Kanako Shojiki1, Kenjiro Uesugi3,4, Hideto Miyake1 (1.Grad. Sch. of Eng. Mie Univ, 2.SPORR Mie Univ, 3.MRPCO Mie Univ, 4.Grad. Sch. of RIS. Mie Univ)

Keywords:Boron Nitride, Metal Organic Chemical Vapor Deposition, High-temperature Annealing