1:30 PM - 1:45 PM
△ [21p-B203-2] Time-of-flight mass spectrometric study of metalorganic vapor phase epitaxy process of β-Ga2O3
Keywords:Gallium oxide, Metalorganic vapor phase epitaxy
Oral presentation
21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
Wed. Sep 21, 2022 1:15 PM - 6:45 PM B203 (B203)
Kazuyuki Uno(Wakayama Univ.), Kosaku Shimizu(Nihon Univ.)
1:30 PM - 1:45 PM
Keywords:Gallium oxide, Metalorganic vapor phase epitaxy