[21p-C106-1~11] 6.5 Surface Physics, Vacuum

[21p-C106-8] Cathodoluminescence Properties from Ion-milled Znic Oxide Surfaces

〇Kei Hosomi^1,2, Wataru Inami^1,2, Yoshimasa Kawata^1,2 (1.Shizuoka Univ., 2.CREST)

Keywords:zinc oxide, cathodoluminescence imaging, ion beam

ZnO is a possible candidate for a nanometric light source for an electron beam excitation assisted (EXA) optical microscope due to its highly efficient ultraviolet emission. The EXA system uses a focused elecron beam to generate a light spot several tens of nanometers in diameter. This study employs an ion milling procedure to flatten the surfaces of the ZnO thin film for a nanometric homogeneous light source.