The 83rd JSAP Autumn Meeting 2022

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Oral presentation

6 Thin Films and Surfaces » 6.5 Surface Physics, Vacuum

[21p-C106-1~11] 6.5 Surface Physics, Vacuum

Wed. Sep 21, 2022 1:30 PM - 4:30 PM C106 (C106)

Akitaka Yoshigoe(JAEA), Kei Mitsuhara(KOBELCO RESEARCH INSTITUTE, INC.)

3:45 PM - 4:00 PM

[21p-C106-9] Effect of a LiF layer on passivation performance of TiOx/SiOy/crystalline Si heterostructures after metallization

〇(M2)Shohei Fukaya1, Kazuhiro Gotoh1, Takuya Matsui2, Hitoshi Sai2, Yasuyoshi Kurokawa1, Noritaka Usami1 (1.Graduate School of Eng., Nagoya Univ., 2.GZR, AIST)

Keywords:interface, electron selective layer