The 83rd JSAP Autumn Meeting 2022

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6 Thin Films and Surfaces » 6.6 Probe Microscopy

[21p-C201-1~11] 6.6 Probe Microscopy

Wed. Sep 21, 2022 1:30 PM - 4:30 PM C201 (C201)

Yasuyuki Saino (東北大)

3:45 PM - 4:00 PM

[21p-C201-9] Dual Bias Modulation Electrostatic Force Microscopy on n-Si/n-Si and p-Si/p-Si Junctions Fabricated by Surface-activated Bonding

〇Daichi Kobayashi1, Jianbo Liang3, Naoteru Shigekawa3, Takuji Takahashi1,2 (1.IIS, Univ. Tokyo, 2.NanoQuine, Univ. Tokyo, 3.Osaka Metropolitan Univ.)

Keywords:Electrostatic Force Microscopy, Surface-activated Bonding