The 83rd JSAP Autumn Meeting 2022

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Oral presentation

13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[22a-A102-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

Thu. Sep 22, 2022 9:00 AM - 11:45 AM A102 (A102)

Daniel Moraru(静大)

9:45 AM - 10:00 AM

[22a-A102-4] Study of backgate effect voltage on single-electron tunneling in co-doped Si nano-transistors

〇Tsutomu Kaneko1, Jupalli Taruna Teja1, Moraru Daniel1 (1.RIE, Shizuoka Univ)

Keywords:Dopant, Single electron transistor, Quantum dot